Description
The RKI Instruments FP-260AGZS is a sample-drawing gas monitor for perfluorinated etch gases such as C5F8, C4F6 and C3F6, which are hard to detect directly. The instrument first converts the target gas into compounds that react more readily, then passes them over a colorimetric tape. The color change on the tape is read optically and converted to a ppm concentration. The tape sits in a plug-in cassette that is easy to swap, and the unit shows how much tape remains. Semiconductor fabs use it to watch for leaks at low concentrations.
Key features
- Conversion plus colorimetric tape detection for C5F8, C4F6 or C3F6
- Suited to low gas concentrations
- Minimal interference from solvents such as Fluorinert and Galden
- Plug-in tape cassette for quick replacement
- Display of remaining cassette tape
Typical applications
- Semiconductor fab cleanroom monitoring
- Leak detection at etch tools and gas cabinets
- Monitoring of exhaust and gas delivery areas
Specifications
| Brand | RKI Instruments |
|---|---|
| Model | FP-260AGZS |
| Product type | Tape-type (colorimetric) gas monitor |
| Target gases | C5F8, C4F6 or C3F6 (as configured) |
| Detection principle | Gas conversion followed by colorimetric tape reaction |
| Sampling | Sample-drawing |
| Consumable | Plug-in tape cassette |
| Tape status | Remaining-tape display |
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